May 2010 Archives by date

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Starting: Tue May 4 13:02:22 PDT 2010
Ending: Sun May 30 07:49:19 PDT 2010
Messages: 42

Problem stsetch SNF 2010-04-02 17:05:25: Etch rates after chuck rebuild latta at snf.stanford.edu
Comment stsetch SNF 2010-05-04 13:04:23: May qual latta at snf.stanford.edu
Problem stsetch SNF 2010-05-06 10:08:36: High cooling He flow eenriquez at snf.stanford.edu
Comment stsetch SNF 2010-05-06 11:09:06: Update eenriquez at snf.stanford.edu
Comment stsetch SNF 2010-05-06 11:09:06: Update eenriquez at snf.stanford.edu
Problem stsetch SNF 2010-05-07 21:20:38: broken piece outside the holding area mtan at snf.stanford.edu
Problem stsetch SNF 2010-05-08 16:46:42: flow fluctuation jjeong1 at snf.stanford.edu
Problem stsetch SNF 2010-05-09 19:27:44: He Pressure pponce at snf.stanford.edu
Problem stsetch SNF 2010-05-09 19:31:01: He Pressure dton at snf.stanford.edu
Problem stsetch SNF 2010-05-10 16:24:02: More troubles with backside He nharjee at snf.stanford.edu
Problem stsetch SNF 2010-05-10 22:16:27: He flow fluctuation jjeong1 at snf.stanford.edu
Problem stsetch SNF 2010-05-11 21:17:15: Serial communication fault jjeong1 at snf.stanford.edu
Problem stsetch SNF 2010-05-11 21:17:15: Serial communication fault eenriquez at snf.stanford.edu
Shutdown stsetch SNF 2010-05-12 10:23:33: He cooling leak eenriquez at snf.stanford.edu
Shutdown stsetch SNF 2010-05-12 10:23:33: He cooling leak eenriquez at snf.stanford.edu
Shutdown stsetch SNF 2010-05-12 11:23:27: excessive load lock error mtan at snf.stanford.edu
Shutdown stsetch SNF 2010-05-12 11:23:27: excessive load lock error eenriquez at snf.stanford.edu
Problem stsetch SNF 2010-05-13 19:54:39: cannot load wafer xzhuan1 at snf.stanford.edu
Shutdown stsetch SNF 2010-05-13 20:24:35: load plate shaking xzhuan1 at snf.stanford.edu
Shutdown stsetch SNF 2010-05-13 20:24:35: load plate shaking eenriquez at snf.stanford.edu
Problem stsetch SNF 2010-05-14 16:07:21: Erroneous cover-open sensor bchui at snf.stanford.edu
Comment stsetch SNF 2010-05-14 16:20:25: Re: load lock cover sensor erratic behavior bchui at snf.stanford.edu
Problem stsetch SNF 2010-05-14 19:08:03: controller error xzhuan1 at snf.stanford.edu
Comment stsetch SNF 2010-05-16 00:27:57: controller error cleared, wafer recovered. ericp at snf.stanford.edu
Comment stsetch SNF 2010-05-16 00:27:57: controller error cleared, wafer recovered. cbaxter at snf.stanford.edu
Problem stsetch SNF 2010-05-14 19:08:03: controller error cbaxter at snf.stanford.edu
Problem stsetch SNF 2010-05-14 16:07:21: Erroneous cover-open sensor cbaxter at snf.stanford.edu
Problem stsetch SNF 2010-05-13 19:54:39: cannot load wafer cbaxter at snf.stanford.edu
Problem stsetch SNF 2010-05-17 18:02:47: Helium pressure extremely low damodei at snf.stanford.edu
Problem stsetch SNF 2010-05-18 02:46:42: wafer broke in chamber damodei at snf.stanford.edu
Problem stsetch SNF 2010-05-18 02:46:42: wafer broke in chamber eenriquez at snf.stanford.edu
Comment stsetch SNF 2010-05-19 04:22:56: Coil power out of tolerance error ywidjaja at snf.stanford.edu
Comment stsetch SNF 2010-05-21 15:24:14: Update He leak rate eenriquez at snf.stanford.edu
Problem stsetch SNF 2010-05-23 03:32:36: Broken wafer pieces mislam at snf.stanford.edu
Comment stsetch SNF 2010-05-23 16:35:15: Etch observations rik at snf.stanford.edu
Problem stsetch SNF 2010-05-26 09:17:52: icp exception during etching xzhuan1 at snf.stanford.edu
Problem stsetch SNF 2010-05-23 03:32:36: Broken wafer pieces latta at snf.stanford.edu
Comment stsetch SNF 2010-05-27 15:02:52: Late May Qual- ER low latta at snf.stanford.edu
Problem stsetch SNF 2010-05-28 11:41:14: mtan at snf.stanford.edu
Comment stsetch SNF 2010-05-28 11:41:18: mtan at snf.stanford.edu
Comment stsetch SNF 2010-05-28 15:02:33: Update He leak eenriquez at snf.stanford.edu
Problem stsetch SNF 2010-05-30 07:49:19: wafer broken, He pressure low jwpchen at snf.stanford.edu

Last message date: Sun May 30 07:49:19 PDT 2010
Archived on: Fri Jan 11 13:11:24 PST 2013

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