From jcdoll at snf.stanford.edu Mon Nov 1 20:55:59 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Mon, 1 Nov 2010 20:55:59 -0700 Subject: Problem stsetch SNF 2010-11-01 20:55:59: Etch rate decreasing + grass Message-ID: I ran the standard DEEP recipe at the end of September and obtained an etch rate of 2um/min and no grass formed. In fact, the etch dominated the passivation so much that the sidewall angle was about 94 degrees (reentrant sidewall profile). I ran the standard DEEP recipe again today and the etch rate is <1.5um/min (still etching the wafer, so it may be even lower) and grass slowly formed, covering the entire wafer by the 3.5hr mark. Both runs were performed after running the same seasoning recipe (3min SF6 etchback, 10min O2 plasma and 20min switched gas along the lines of the standard UC Berkeley process). Wafers are 300um wide trenches with 10% exposed area, 7um thick photoresist on front and back, wafers in the Al holder. He cooling is steady at ~27.8 sccm. From jcdoll at snf.stanford.edu Mon Nov 1 21:49:37 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Mon, 1 Nov 2010 21:49:37 -0700 Subject: Problem stsetch SNF 2010-11-01 21:49:36: RF coil generator overheat Message-ID: The red overheat light on the RF coil generator comes on for a few seconds at the start of the etch process before going away. Also, although the power displayed by the computer is ~600W, the readout on the generator is ~200W - could the accuracy of the coil power be checked using an external meter? From jwpchen at snf.stanford.edu Tue Nov 2 06:26:44 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Tue, 2 Nov 2010 06:26:44 -0700 Subject: Comment stsetch SNF 2010-11-02 06:26:44: RF coil power variable? Message-ID: analog RF power gauge was reading 200W at the beginning of my run, now it's closer to 300W... smog check fail From jcdoll at snf.stanford.edu Wed Nov 3 12:15:20 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Wed, 3 Nov 2010 12:15:20 -0700 Subject: Comment stsetch SNF 2010-11-03 12:15:19: grass only for > 1-2 hour etches Message-ID: sorry, i wasn't perfectly clear in my grass problem report. the grass first appears at the edge of the wafer after about 1.5 hours of etching and then steadily expands until it covers the entire wafer at about the 4 hour mark. the exact time likely varies from user to user, but the grass problem is unlikely to appear for short (< 2 hour) tests. the problem suggests that the etch rate decreases over time for some reason. From dongrip at snf.stanford.edu Thu Nov 11 19:31:45 2010 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Thu, 11 Nov 2010 19:31:45 -0800 Subject: Problem stsetch SNF 2010-11-11 19:31:45: severe grass formation in smooshal recipe Message-ID: I etched Si wafers with 400 nm thick oxide mask using smooshal recipe for 13 min to aim 8~9 microns thick etch. However, huge grass was formed on the left bottom (3/4) of the wafers. Two days ago, I etched the same type of samples with the exactly same recipe and time, and I had very good results under SEM. I don't know what happened to the machine in a couple of days. The helium flow rate was quite stable for the entire runs (~2.76~2.78 sccm). Please fix this issue ASAP. Thank you! From eenriquez at snf.stanford.edu Fri Nov 12 13:52:23 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Nov 2010 13:52:23 -0800 Subject: Comment stsetch SNF 2010-11-12 13:52:22: Update grass problem Message-ID: Ran O2 clean for over 2 hours. We will perform a chamber clean next Wed and Thurs. From latta at snf.stanford.edu Fri Nov 19 14:25:20 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Nov 2010 14:25:20 -0800 Subject: Problem stsetch SNF 2010-08-23 16:53:52: Check Etch Rates Message-ID: Wafer to wafer etch rates are much more consistent since the turbo was changed From latta at snf.stanford.edu Fri Nov 19 14:25:55 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Nov 2010 14:25:55 -0800 Subject: Comment stsetch SNF 2010-08-27 09:19:41: Test wafer results Message-ID: archived From latta at snf.stanford.edu Fri Nov 19 14:26:37 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Nov 2010 14:26:37 -0800 Subject: Comment stsetch SNF 2010-08-31 15:26:52: Check Your Recipes! Message-ID: parameter changing by user seems to have abated From latta at snf.stanford.edu Fri Nov 19 14:27:11 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Nov 2010 14:27:11 -0800 Subject: Comment stsetch SNF 2010-09-17 20:31:52: Qual following SF6 MFC recal Message-ID: many other quals have been run since. See wiki From latta at snf.stanford.edu Fri Nov 19 14:27:33 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Nov 2010 14:27:33 -0800 Subject: Comment stsetch SNF 2010-09-30 08:01:19: Helium metering valve Message-ID: archived From latta at snf.stanford.edu Fri Nov 19 14:28:17 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Nov 2010 14:28:17 -0800 Subject: Comment stsetch SNF 2010-10-12 17:44:16: Echo dongrip on grass Message-ID: still chasing grass issues From latta at snf.stanford.edu Fri Nov 19 14:28:33 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Nov 2010 14:28:33 -0800 Subject: Comment stsetch SNF 2010-10-13 17:08:49: Quals after turbo replacement Message-ID: archived From latta at snf.stanford.edu Fri Nov 19 14:28:59 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Nov 2010 14:28:59 -0800 Subject: Comment stsetch SNF 2010-10-14 14:46:46: Update pump problem Message-ID: arcived From latta at snf.stanford.edu Fri Nov 19 14:30:57 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Nov 2010 14:30:57 -0800 Subject: Problem stsetch SNF 2010-10-21 00:28:00: SF6 MFC not always stable Message-ID: seems to be steady now- did the SF6 heal itself? From latta at snf.stanford.edu Fri Nov 19 14:31:13 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Nov 2010 14:31:13 -0800 Subject: Comment stsetch SNF 2010-10-23 11:37:55: echo jwpchen on sf6 flow instability Message-ID: archived From latta at snf.stanford.edu Fri Nov 19 14:31:45 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Nov 2010 14:31:45 -0800 Subject: Comment stsetch SNF 2010-10-24 05:10:52: two wafer chunks in chamber Message-ID: archived From latta at snf.stanford.edu Fri Nov 19 14:32:40 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Nov 2010 14:32:40 -0800 Subject: Comment stsetch SNF 2010-10-26 09:11:02: additional o-rings Message-ID: As of today their are two viton o-rings and one while (silicone?) o-ring From latta at snf.stanford.edu Fri Nov 19 14:36:09 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Nov 2010 14:36:09 -0800 Subject: Comment stsetch SNF 2010-11-12 13:52:22: Update grass problem Message-ID: Chamber clean canceled. Will do soon. Announcement to follow.... From dkozak at snf.stanford.edu Sat Nov 20 04:00:59 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Sat, 20 Nov 2010 04:00:59 -0800 Subject: Problem stsetch SNF 2010-11-20 04:00:59: Communication error Message-ID: The program was up, with window declaring "Operator Station Shut down -- Communications timeout" When clicked, the program quit. Trying to re-start the program, gives the same message on start-up and quits again. From eenriquez at snf.stanford.edu Tue Nov 23 10:10:23 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Nov 2010 10:10:23 -0800 Subject: Problem stsetch SNF 2010-11-20 04:00:59: Communication error Message-ID: User was able to clear the error and reboot the software. From eenriquez at snf.stanford.edu Tue Nov 23 10:12:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Nov 2010 10:12:30 -0800 Subject: Comment stsetch SNF 2010-11-23 10:12:29: Update grass problem Message-ID: Will perform chamber clean on Dec. 1 From dkozak at snf.stanford.edu Mon Nov 29 03:26:42 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Mon, 29 Nov 2010 03:26:42 -0800 Subject: Problem stsetch SNF 2010-11-29 03:26:41: SF6 tolerance error Message-ID: SF6 is all over the place -- jumping from 150 to 99. A lot of errors. Have to restart the process several times From eenriquez at snf.stanford.edu Mon Nov 29 10:44:22 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 29 Nov 2010 10:44:22 -0800 Subject: Shutdown stsetch SNF 2010-11-29 10:44:21: Unstable sF6 flow Message-ID: From eenriquez at snf.stanford.edu Mon Nov 29 15:11:07 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 29 Nov 2010 15:11:07 -0800 Subject: Comment stsetch SNF 2010-11-29 15:11:07: Update SF6 flow Message-ID: Ordered a new MFC. MFC should be here on Wed. Will perform chamber starting tomorrow. From eenriquez at snf.stanford.edu Tue Nov 30 14:48:07 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 30 Nov 2010 14:48:07 -0800 Subject: Comment stsetch SNF 2010-11-30 14:48:07: Update Message-ID: Completed cleaning the chamber. Need to finish reassembly and also replace the SF6 MFC.