Problem stsetch SNF 2010-11-01 21:49:36: RF coil generator overheat

jcdoll at snf.stanford.edu jcdoll at snf.stanford.edu
Mon Nov 1 21:49:37 PDT 2010


The red overheat light on the RF coil generator comes on for a few seconds at the start of the etch process before going away.
Also, although the power displayed by the computer is ~600W, the readout on the generator is ~200W - could the accuracy of the coil power be checked using an external meter?




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