Problem stsetch SNF 2010-11-01 21:49:36: RF coil generator overheat

[jcdoll at snf.stanford.edu]

The red overheat light on the RF coil generator comes on for a few seconds at the start of the etch process before going away.
Also, although the power displayed by the computer is ~600W, the readout on the generator is ~200W - could the accuracy of the coil power be checked using an external meter?