Comment stsetch SNF 2010-10-23 11:37:55: echo jwpchen on sf6 flow instability
latta at snf.stanford.edu
latta at snf.stanford.edu
Fri Nov 19 14:31:13 PST 2010
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Problem stsetch SNF 2010-10-21 00:28:00: SF6 MFC not always stable
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Problem stsetch SNF 2010-10-21 00:28:00: SF6 MFC not always stable
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Comment stsetch SNF 2010-10-24 05:10:52: two wafer chunks in chamber
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