November 2010 Archives by author

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Starting: Mon Nov 1 20:55:59 PDT 2010
Ending: Tue Nov 30 14:48:07 PST 2010
Messages: 26

• Problem stsetch SNF 2010-11-20 04:00:59: Communication error   dkozak at snf.stanford.edu
• Problem stsetch SNF 2010-11-29 03:26:41: SF6 tolerance error   dkozak at snf.stanford.edu
• Problem stsetch SNF 2010-11-11 19:31:45: severe grass formation in smooshal recipe   dongrip at snf.stanford.edu
• Comment stsetch SNF 2010-11-12 13:52:22: Update grass problem   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-11-20 04:00:59: Communication error   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-11-23 10:12:29: Update grass problem   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2010-11-29 10:44:21: Unstable sF6 flow   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-11-29 15:11:07: Update SF6 flow   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-11-30 14:48:07: Update   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-11-01 20:55:59: Etch rate decreasing + grass   jcdoll at snf.stanford.edu
• Problem stsetch SNF 2010-11-01 21:49:36: RF coil generator overheat   jcdoll at snf.stanford.edu
• Comment stsetch SNF 2010-11-03 12:15:19: grass only for > 1-2 hour etches   jcdoll at snf.stanford.edu
• Comment stsetch SNF 2010-11-02 06:26:44: RF coil power variable?   jwpchen at snf.stanford.edu
• Problem stsetch SNF 2010-08-23 16:53:52: Check Etch Rates   latta at snf.stanford.edu
• Comment stsetch SNF 2010-08-27 09:19:41: Test wafer results   latta at snf.stanford.edu
• Comment stsetch SNF 2010-08-31 15:26:52: Check Your Recipes!   latta at snf.stanford.edu
• Comment stsetch SNF 2010-09-17 20:31:52: Qual following SF6 MFC recal   latta at snf.stanford.edu
• Comment stsetch SNF 2010-09-30 08:01:19: Helium metering valve   latta at snf.stanford.edu
• Comment stsetch SNF 2010-10-12 17:44:16: Echo dongrip on grass   latta at snf.stanford.edu
• Comment stsetch SNF 2010-10-13 17:08:49: Quals after turbo replacement   latta at snf.stanford.edu
• Comment stsetch SNF 2010-10-14 14:46:46: Update pump problem   latta at snf.stanford.edu
• Problem stsetch SNF 2010-10-21 00:28:00: SF6 MFC not always stable   latta at snf.stanford.edu
• Comment stsetch SNF 2010-10-23 11:37:55: echo jwpchen on sf6 flow instability   latta at snf.stanford.edu
• Comment stsetch SNF 2010-10-24 05:10:52: two wafer chunks in chamber   latta at snf.stanford.edu
• Comment stsetch SNF 2010-10-26 09:11:02: additional o-rings   latta at snf.stanford.edu
• Comment stsetch SNF 2010-11-12 13:52:22: Update grass problem   latta at snf.stanford.edu

Last message date: Tue Nov 30 14:48:07 PST 2010
Archived on: Fri Jan 11 13:11:25 PST 2013

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