From jwpchen at snf.stanford.edu Tue Oct 5 20:10:29 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Tue, 5 Oct 2010 20:10:29 -0700 Subject: Comment stsetch SNF 2010-10-05 20:10:29: need new aluminum holders Message-ID: with the current holder, helium flow varies up to 0.3 (== 3sccm) between orientations. this is repeatable, for example flat at 12 o'clock tends to has less flow. mary said it's not hard to fabricate holders, so it makes sense to make a batch of new holders and swap one in regularly. From dongrip at snf.stanford.edu Thu Oct 7 13:51:45 2010 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Thu, 7 Oct 2010 13:51:45 -0700 Subject: Problem stsetch SNF 2010-10-07 13:51:44: dry etching quality difference (grass formation) Message-ID: I normally use smooshal recipe for 12 min, and the etching quality became significantly worse thses days. For example, I had very good results in terms of no grass by eyes (08/25/10), but at this time (10/04/10), with the same recipe and etching time and the same oxide mask sample with same design, I could see big white circles covering majority of my wafer. I don't know why this happens. The helium flow rate was stable to 2.47. Apprarently, the only difference to me was the helium flow rate shift to 2.47 from ~1.42. From latta at snf.stanford.edu Thu Oct 7 17:20:42 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Oct 2010 17:20:42 -0700 Subject: Comment stsetch SNF 2010-10-07 17:20:41: He pressure warning Message-ID: On my 3rd and 4th wafers (of 4) the He pressure dropped from 9.79T to 4.66. There was no noticable change in the PR etch rate, but my etches are short, 10 mins. From eenriquez at snf.stanford.edu Fri Oct 8 08:59:14 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Oct 2010 08:59:14 -0700 Subject: Comment stsetch SNF 2010-10-07 17:20:41: He pressure warning Message-ID: Found the helium pressure knob had been adjusted. From eenriquez at snf.stanford.edu Tue Oct 12 15:05:20 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Oct 2010 15:05:20 -0700 Subject: Shutdown stsetch SNF 2010-10-12 15:05:19: pumping too slowly Message-ID: Turbo current is too high and the turbo is pumping down too slowly. Need to replace the turbo and/or clean the pumping line. From bchui at snf.stanford.edu Tue Oct 12 17:44:16 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 12 Oct 2010 17:44:16 -0700 Subject: Comment stsetch SNF 2010-10-12 17:44:16: Echo dongrip on grass Message-ID: I also got grass while etching thru a 500um thick wafer using the standard DEEP recipe. Ruined my buried oxide membranes. From latta at snf.stanford.edu Wed Oct 13 17:08:49 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 13 Oct 2010 17:08:49 -0700 Subject: Comment stsetch SNF 2010-10-13 17:08:49: Quals after turbo replacement Message-ID: Ran 20 min DEEP conditioning, then 4 wafers of DEEP for 10 mins; Wf #1 Si ER = 1.67um/min, PR ER = 246A/min, Sel = 68 : 1 Af #2 Si ER = 1.63um/min, PR ER = 258A/min, Sel = 63 : 1 Wf #3 Si ER = 1.67um/min, PR ER = 246A/min, Sel = 68 : 1 Wf #4 Si ER = 1.67um/min, PR ER = 236A/min, Sel = 71 : 1 Si ER is less than expected. Note chamber pressures will be lower, too. From eenriquez at snf.stanford.edu Wed Oct 13 17:32:06 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Oct 2010 17:32:06 -0700 Subject: Shutdown stsetch SNF 2010-10-12 15:05:19: pumping too slowly Message-ID: Replaced turbo pump and cleaned the foreline and exhaust line. Also replaced the helium seal. From mislam at snf.stanford.edu Wed Oct 13 23:33:12 2010 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 13 Oct 2010 23:33:12 -0700 Subject: Problem stsetch SNF 2010-10-13 23:33:11: turbo error "E0006" Message-ID: Turbo errors out, machine status saya "waiting for chamber..." From mdickey at snf.stanford.edu Thu Oct 14 06:16:18 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 14 Oct 2010 06:16:18 -0700 Subject: Shutdown stsetch SNF 2010-10-14 06:16:17: pumps Message-ID: Need to investigate why the pumps are off From eenriquez at snf.stanford.edu Thu Oct 14 14:32:05 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Oct 2010 14:32:05 -0700 Subject: Problem stsetch SNF 2010-10-13 23:33:11: turbo error "E0006" Message-ID: Found the mechanical pump circuit breaker had tripped. Replaced the mechanical pump. From eenriquez at snf.stanford.edu Thu Oct 14 14:46:47 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Oct 2010 14:46:47 -0700 Subject: Comment stsetch SNF 2010-10-14 14:46:46: Update pump problem Message-ID: Replaced the dry vacuum pump. Yesterday we replaced the turbo pump. Ran O2 clean and also ran the DEEP recipe. Notice a large shift in the minimum and maximum pressure during the passivation and deposition step when I ran DEEP recipe. On 9/15's monthly PM, the min and max pressures were 17 mT and 34 mT. Now after both the turbo and mechanical pumps were replaced, the min and max are 12 mT and 22 mT. Please qualify your process before committing your actual devices. From latta at snf.stanford.edu Thu Oct 14 17:09:44 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 Oct 2010 17:09:44 -0700 Subject: Shutdown stsetch SNF 2010-10-14 06:16:17: pumps Message-ID: dry pupm replaced. see Elmer's commet of 10/14 From jwpchen at snf.stanford.edu Fri Oct 15 02:18:49 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Fri, 15 Oct 2010 02:18:49 -0700 Subject: Problem stsetch SNF 2010-10-15 02:18:48: process does not start - software stuck? Message-ID: running DEEP recipe, process goes into pumpdown step (20seconds) but timer stays at 00:00 forever From eenriquez at snf.stanford.edu Fri Oct 15 09:25:53 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Oct 2010 09:25:53 -0700 Subject: Problem stsetch SNF 2010-10-15 02:18:48: process does not start - software stuck? Message-ID: The software lost communication with the ICP. Reset the system and ran the Deep recipe several times with no problems. From latta at snf.stanford.edu Fri Oct 15 11:02:59 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 Oct 2010 11:02:59 -0700 Subject: Problem stsetch SNF 2010-10-15 11:02:59: loadlock excessive pump out alarm Message-ID: Took too long to pump out. Wafer is in load lock- never loaded. From latta at snf.stanford.edu Fri Oct 15 11:28:43 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 Oct 2010 11:28:43 -0700 Subject: Comment stsetch SNF 2010-10-15 11:28:42: correction to problem Message-ID: wafer did finally load. From latta at snf.stanford.edu Fri Oct 15 12:32:14 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 Oct 2010 12:32:14 -0700 Subject: Comment stsetch SNF 2010-10-15 12:32:14: Quals after pumps replaced Message-ID: Here are the results of the quals after the turbo and dry pump were replaced. DEEP 00:10:00 with a 00:20:00 conditioning before the first wafer was run; 10/13- Turbo replaced Wf 10/13 1 Si ER = 1.67um/min, PR ER = 246A/min, Sel = 68 : 1 Wf 10/13 2 Si ER = 1.63um/min, PR ER = 267A/min, Sel = 63 : 1 Wf 10/13 3 Si ER = 1.67um/min, PR ER = 246A/min, Sel = 68 : 1 Wf 10/13 1 Si ER = 1.67um/min, PR ER = 236A/min, Sel = 71 : 1 10/14- Dry pump replaced Wf 10/14 1 Si ER = 1.74um/min, PR ER = 243A/min, Sel = 72 : 1 Wf 10/14 2 Si ER = 1.74um/min, PR ER = 243A/min, Sel = 72 : 1 Wf 10/14 3 Si ER = 1.71um/min, PR ER = 243A/min, Sel = 70 : 1 From latta at snf.stanford.edu Fri Oct 15 15:07:04 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 Oct 2010 15:07:04 -0700 Subject: Problem stsetch SNF 2010-10-15 12:12:09: tool problem Message-ID: Rf fine now. Etch completed. From latta at snf.stanford.edu Fri Oct 15 15:07:15 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 Oct 2010 15:07:15 -0700 Subject: Comment stsetch SNF 2010-10-15 11:28:42: correction to problem Message-ID: archived From latta at snf.stanford.edu Fri Oct 15 15:07:28 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 Oct 2010 15:07:28 -0700 Subject: Problem stsetch SNF 2010-10-15 11:02:59: loadlock excessive pump out alarm Message-ID: did finally load From latta at snf.stanford.edu Fri Oct 15 16:50:52 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 Oct 2010 16:50:52 -0700 Subject: Problem stsetch SNF 2010-10-15 16:50:51: platen RF not turning on Message-ID: Machine is giving an error msg to that effect. From merwan at snf.stanford.edu Fri Oct 15 17:50:56 2010 From: merwan at snf.stanford.edu (merwan at snf.stanford.edu) Date: Fri, 15 Oct 2010 17:50:56 -0700 Subject: Shutdown stsetch SNF 2010-10-15 17:50:55: Message-ID: From merwan at snf.stanford.edu Fri Oct 15 17:54:42 2010 From: merwan at snf.stanford.edu (merwan at snf.stanford.edu) Date: Fri, 15 Oct 2010 17:54:42 -0700 Subject: Shutdown stsetch SNF 2010-10-15 17:54:41: Message-ID: Problem with the platten. It shows no power on the ICP view window and an error message about the platten being out powered appears. From eenriquez at snf.stanford.edu Mon Oct 18 11:40:10 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Oct 2010 11:40:10 -0700 Subject: Shutdown stsetch SNF 2010-10-15 17:54:41: Message-ID: http://www.amazon.com/Otterbox-APL2-iPAD1-20-C4OTR-iPad-Defender-Case/dp/B003TVWNAM/ref=sr_1_7?ie=UTF8&qid=1287179536&sr=8-7 From eenriquez at snf.stanford.edu Mon Oct 18 11:43:48 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Oct 2010 11:43:48 -0700 Subject: Shutdown stsetch SNF 2010-10-15 17:50:55: Message-ID: Found the control cable connector to the platten RF generator was loose. Secured the connector and ran the Deep recipe several times without any problems. From eenriquez at snf.stanford.edu Mon Oct 18 11:44:52 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Oct 2010 11:44:52 -0700 Subject: Problem stsetch SNF 2010-10-15 16:50:51: platen RF not turning on Message-ID: Found the control cable connector to the platten RF generator was loose. Secured the connector and ran the Deep recipe several times without any problems. From jwpchen at snf.stanford.edu Thu Oct 21 00:28:01 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Thu, 21 Oct 2010 00:28:01 -0700 Subject: Problem stsetch SNF 2010-10-21 00:28:00: SF6 MFC not always stable Message-ID: For DEEP recipe as example, SF6 = 130, which is controlled well for about half the etch cycles, while on other cycles it oscillates between 120~140. This is not the initial transient, but happens during the entire 12 second etch cycle. Sometimes even a steady ISO recipe will see the SF6 variations. From jcdoll at snf.stanford.edu Sat Oct 23 08:43:30 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sat, 23 Oct 2010 08:43:30 -0700 Subject: Problem stsetch SNF 2010-10-23 08:43:30: RF not available Message-ID: System is stuck - it thinks that a sequence is in progress and says that RF is not available. May be related to an accidental logout this morning by the previous user. From jcdoll at snf.stanford.edu Sat Oct 23 08:59:20 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sat, 23 Oct 2010 08:59:20 -0700 Subject: Comment stsetch SNF 2010-10-23 08:59:19: Tool working again Message-ID: Managed to unstick the sequence editor. Tool is up and running again. From jcdoll at snf.stanford.edu Sat Oct 23 11:37:56 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sat, 23 Oct 2010 11:37:56 -0700 Subject: Comment stsetch SNF 2010-10-23 11:37:55: echo jwpchen on sf6 flow instability Message-ID: i'm seeing the same 120-140 sf6 flow instability for a 30mT pressure controlled recipe. From jwpchen at snf.stanford.edu Sun Oct 24 05:10:53 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Sun, 24 Oct 2010 05:10:53 -0700 Subject: Comment stsetch SNF 2010-10-24 05:10:52: two wafer chunks in chamber Message-ID: my wafer grenaded with 5 minutes of etch remaining. the features are small openings taking 5% area, so wafer is not supposed to be even remotely fragile. i see two chunks still inside, but those will likely etch away after a few more hours. helium flow still looks good, 2.65 with holder, so just a comment. From jcdoll at snf.stanford.edu Tue Oct 26 09:11:03 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Tue, 26 Oct 2010 09:11:03 -0700 Subject: Comment stsetch SNF 2010-10-26 09:11:02: additional o-rings Message-ID: there's just one working o-ring in the aluminum holder container - the other has been stretched so much it doesn't fit anymore. could another black o-ring be put in the container in case someone decides to stretch out the remaining o-ring? thanks! From eenriquez at snf.stanford.edu Wed Oct 27 13:45:08 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Oct 2010 13:45:08 -0700 Subject: Problem stsetch SNF 2010-10-23 08:43:30: RF not available Message-ID: User was able to clear the error. From eenriquez at snf.stanford.edu Wed Oct 27 13:45:21 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Oct 2010 13:45:21 -0700 Subject: Comment stsetch SNF 2010-10-23 08:59:19: Tool working again Message-ID: Archived From eenriquez at snf.stanford.edu Wed Oct 27 13:47:53 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Oct 2010 13:47:53 -0700 Subject: Problem stsetch SNF 2010-10-07 13:51:44: dry etching quality difference (grass formation) Message-ID: Replaced turbo pump and dry vacuum pump From ericp at snf.stanford.edu Sat Oct 30 01:00:20 2010 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 30 Oct 2010 01:00:20 -0700 Subject: Problem stsetch SNF 2010-10-30 01:00:18: Grass, grass, grass Message-ID: Running standard "DEEP" recipe, silicon turns black. ("microsheep" not working? :)