Comment stsetch SNF 2010-10-07 17:20:41: He pressure warning

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Oct 7 17:20:42 PDT 2010


On my 3rd and 4th wafers (of 4) the He pressure dropped from 9.79T to 4.66.  There was no noticable change in the PR etch rate, but my etches are short, 10 mins.




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