Comment stsetch SNF 2010-10-12 17:44:16: Echo dongrip on grass

bchui at snf.stanford.edu bchui at snf.stanford.edu
Tue Oct 12 17:44:16 PDT 2010


I also got grass while etching thru a 500um thick wafer using the standard DEEP recipe.  Ruined my buried oxide membranes.




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