Comment stsetch SNF 2010-10-13 17:08:49: Quals after turbo replacement

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Oct 13 17:08:49 PDT 2010


Ran 20 min DEEP conditioning, then 4 wafers of DEEP for 10 mins;
Wf #1 Si ER = 1.67um/min, PR ER = 246A/min, Sel = 68 : 1
Af #2  Si ER = 1.63um/min, PR ER = 258A/min, Sel = 63 : 1
Wf #3  Si ER = 1.67um/min, PR ER = 246A/min, Sel = 68 : 1
Wf #4  Si ER = 1.67um/min, PR ER = 236A/min, Sel = 71 : 1
Si ER is less than expected.  Note chamber pressures will be lower, too.




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