Comment stsetch SNF 2010-10-15 12:32:14: Quals after pumps replaced

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Oct 15 12:32:14 PDT 2010


Here are the results of the quals after the turbo and dry pump were replaced.
DEEP 00:10:00 with a 00:20:00 conditioning before the first wafer was run;
10/13- Turbo replaced
Wf 10/13 1 Si ER = 1.67um/min, PR ER = 246A/min, Sel = 68 : 1
Wf 10/13 2 Si ER = 1.63um/min, PR ER = 267A/min, Sel = 63 : 1
Wf 10/13 3 Si ER = 1.67um/min, PR ER = 246A/min, Sel = 68 : 1
Wf 10/13 1 Si ER = 1.67um/min, PR ER = 236A/min, Sel = 71 : 1
10/14- Dry pump replaced
Wf 10/14 1 Si ER = 1.74um/min, PR ER = 243A/min, Sel = 72 : 1
Wf 10/14 2 Si ER = 1.74um/min, PR ER = 243A/min, Sel = 72 : 1
Wf 10/14 3 Si ER = 1.71um/min, PR ER = 243A/min, Sel = 70 : 1




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