Problem stsetch SNF 2010-10-15 12:12:09: tool problem
latta at snf.stanford.edu
latta at snf.stanford.edu
Fri Oct 15 15:07:04 PDT 2010
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Comment stsetch SNF 2010-10-15 12:32:14: Quals after pumps replaced
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Problem stsetch SNF 2010-10-15 16:50:51: platen RF not turning on
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Rf fine now. Etch completed.
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Comment stsetch SNF 2010-10-15 12:32:14: Quals after pumps replaced
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Problem stsetch SNF 2010-10-15 16:50:51: platen RF not turning on
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