October 2010 Archives by subject

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Starting: Tue Oct 5 20:10:29 PDT 2010
Ending: Sat Oct 30 01:00:20 PDT 2010
Messages: 37

• Comment stsetch SNF 2010-10-05 20:10:29: need new aluminum holders   jwpchen at snf.stanford.edu
• Comment stsetch SNF 2010-10-07 17:20:41: He pressure warning   latta at snf.stanford.edu
• Comment stsetch SNF 2010-10-07 17:20:41: He pressure warning   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-10-12 17:44:16: Echo dongrip on grass   bchui at snf.stanford.edu
• Comment stsetch SNF 2010-10-13 17:08:49: Quals after turbo replacement   latta at snf.stanford.edu
• Comment stsetch SNF 2010-10-14 14:46:46: Update pump problem   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-10-15 11:28:42: correction to problem   latta at snf.stanford.edu
• Comment stsetch SNF 2010-10-15 11:28:42: correction to problem   latta at snf.stanford.edu
• Comment stsetch SNF 2010-10-15 12:32:14: Quals after pumps replaced   latta at snf.stanford.edu
• Comment stsetch SNF 2010-10-23 08:59:19: Tool working again   jcdoll at snf.stanford.edu
• Comment stsetch SNF 2010-10-23 08:59:19: Tool working again   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2010-10-23 11:37:55: echo jwpchen on sf6 flow instability   jcdoll at snf.stanford.edu
• Comment stsetch SNF 2010-10-24 05:10:52: two wafer chunks in chamber   jwpchen at snf.stanford.edu
• Comment stsetch SNF 2010-10-26 09:11:02: additional o-rings   jcdoll at snf.stanford.edu
• Problem stsetch SNF 2010-10-07 13:51:44: dry etching quality difference (grass formation)   dongrip at snf.stanford.edu
• Problem stsetch SNF 2010-10-07 13:51:44: dry etching quality difference (grass formation)   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-10-13 23:33:11: turbo error "E0006"   mislam at snf.stanford.edu
• Problem stsetch SNF 2010-10-13 23:33:11: turbo error "E0006"   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-10-15 02:18:48: process does not start - software stuck?   jwpchen at snf.stanford.edu
• Problem stsetch SNF 2010-10-15 02:18:48: process does not start - software stuck?   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-10-15 11:02:59: loadlock excessive pump out alarm   latta at snf.stanford.edu
• Problem stsetch SNF 2010-10-15 11:02:59: loadlock excessive pump out alarm   latta at snf.stanford.edu
• Problem stsetch SNF 2010-10-15 12:12:09: tool problem   latta at snf.stanford.edu
• Problem stsetch SNF 2010-10-15 16:50:51: platen RF not turning on   latta at snf.stanford.edu
• Problem stsetch SNF 2010-10-15 16:50:51: platen RF not turning on   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-10-21 00:28:00: SF6 MFC not always stable   jwpchen at snf.stanford.edu
• Problem stsetch SNF 2010-10-23 08:43:30: RF not available   jcdoll at snf.stanford.edu
• Problem stsetch SNF 2010-10-23 08:43:30: RF not available   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-10-30 01:00:18: Grass, grass, grass   ericp at snf.stanford.edu
• Shutdown stsetch SNF 2010-10-12 15:05:19: pumping too slowly   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2010-10-12 15:05:19: pumping too slowly   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2010-10-14 06:16:17: pumps   mdickey at snf.stanford.edu
• Shutdown stsetch SNF 2010-10-14 06:16:17: pumps   latta at snf.stanford.edu
• Shutdown stsetch SNF 2010-10-15 17:50:55:   merwan at snf.stanford.edu
• Shutdown stsetch SNF 2010-10-15 17:50:55:   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2010-10-15 17:54:41:   merwan at snf.stanford.edu
• Shutdown stsetch SNF 2010-10-15 17:54:41:   eenriquez at snf.stanford.edu

Last message date: Sat Oct 30 01:00:20 PDT 2010
Archived on: Fri Jan 11 13:11:25 PST 2013

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