Problem stsetch SNF 2010-09-03 02:30:45: one clamp finger tip fell off

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Fri Sep 3 02:30:46 PDT 2010


one clamp finger tip must have become detached after process, then came out when my wafer unloaded. please check your helium flow closely since the clamp pressure may no longer be even. i left the finger tip in the tray for the aluminum holder




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