Comment stsetch SNF 2010-09-17 20:31:52: Qual following SF6 MFC recal

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Sep 17 20:31:52 PDT 2010


Results:
Average Silicon ER  = 2.09 microns/min
Silicon etch nonuniformity = 4.9%
Resist ER = 220 A/min
Selectivity of silicon to resist = 95
Results are normal




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