Comment stsetch SNF 2010-09-20 00:05:37: He flow rates as quals data

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Mon Sep 20 00:05:37 PDT 2010


Could staff always post the following after a system quals as guidelines: (1) He base flow rate with ideal seal (2) He reference flow rate with good wafer on lip seal (3) He reference flow rate with good wafer in Al holder (4) He max flow rate with no wafer           
The He base flow rate appears to drift over the weeks... now it's about 1.6. The He pressure reading appears to have little indication on the level of cooling. With He flow rates included in the quals data, users can estimate the level of cooling actually available to the wafer.




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