Shutdown stsetch SNF 2011-04-15 15:39:21: High chamber leak rate

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Apr 15 15:39:22 PDT 2011


Leak rate after recovering the broken wafer was about 350 mT/min.  Found a leak at the chamber o-ring (bottom of ceramic chamber).  Leak rate now is at  40 mT/min.  The spec is < 5mT/min and is normally less than 2.  Ran O2 plasma for 20 min but the leak rate is not improving. 




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