Shutdown stsetch SNF 2011-04-21 14:58:12:

jasmine at jasmine at
Thu Apr 21 14:58:13 PDT 2011

My wafer is stuck in the chamber. I loaded the wafer and  was ready to process but alarams came up and  I noticed the chamber didn't  even pump down. INfact I can even open the load lock chamber...Very wierd!

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