Shutdown stsetch SNF 2011-04-26 02:07:04: broken wafer

cbaxter at cbaxter at
Tue Apr 26 08:48:25 PDT 2011

recoved wafer pieces. When running long etches, they should be
staggered runs as not to let the wafer stick to the chuck due to it
being too thin. Running O2 clean.

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