Shutdown stsetch SNF 2011-04-26 02:07:04: broken wafer

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Apr 26 08:48:25 PDT 2011


recoved wafer pieces. When running long etches, they should be
staggered runs as not to let the wafer stick to the chuck due to it
being too thin. Running O2 clean.




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