Shutdown stsetch SNF 2011-08-02 12:02:29: wafer broken in chamber, please take out the broken pieces for me.

xzhuan1 at snf.stanford.edu xzhuan1 at snf.stanford.edu
Tue Aug 2 12:02:30 PDT 2011


I took out most of the pieces on the wafer carrier. But there are still a few remaining in the chamber. Please take them out. They are very valuable pieces to me! 




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