Shutdown stsetch SNF 2011-08-06 11:47:33: Wafer Broke in Chamber

ehsans at snf.stanford.edu ehsans at snf.stanford.edu
Sat Aug 6 11:47:33 PDT 2011


I was clearing 8.5 um of poly when my wafer broke in the chamber.  Unloading removed half of it, but some pieces are still in there.




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