Problem stsetch SNF 2011-08-11 15:20:19: platen power out of tolerance

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Aug 12 09:11:46 PDT 2011


No problem found.  Ran the deep recipe for 20 min with no problems.  Possible cause of the platen power out of tolerance fault is a high helium leak rate.  The system turns the RF power off to the platen if the cooling He leak rate is too high.




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