Problem stsetch SNF 2011-08-17 18:11:12: drop in etch rate

mtan at snf.stanford.edu mtan at snf.stanford.edu
Wed Aug 17 18:11:12 PDT 2011


The etch rate seems to be dropping.
on Monday 350um was etched in 6 hours
Tuesday it became 6.5 to 7 hours
and today I was not able to etch a through wafer in 8 hours.




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