August 2011 Archives by subject

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Starting: Tue Aug 2 12:02:30 PDT 2011
Ending: Tue Aug 30 15:07:13 PDT 2011
Messages: 27

• Comment stsetch SNF 2011-06-23 09:46:41: Completed monthly PM   latta at snf.stanford.edu
• Comment stsetch SNF 2011-08-03 08:58:17: O2 clean   mdickey at snf.stanford.edu
• Comment stsetch SNF 2011-08-03 08:58:17: O2 clean   latta at snf.stanford.edu
• Comment stsetch SNF 2011-08-10 00:50:28: PR burned off on two wafers   dkozak at snf.stanford.edu
• Comment stsetch SNF 2011-08-10 00:50:28: PR burned off on two wafers   Mahnaz Mansourpour
• Comment stsetch SNF 2011-08-10 00:50:28: PR burned off on two wafers   latta at snf.stanford.edu
• Comment stsetch SNF 2011-08-10 12:03:21: He low when plasma strikes 3.47   zpatel at snf.stanford.edu
• Comment stsetch SNF 2011-08-10 12:03:21: He low when plasma strikes 3.47   latta at snf.stanford.edu
• Comment stsetch SNF 2011-08-10 18:08:44: Completed monthly PM   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2011-08-11 11:24:32: qual run after repair   latta at snf.stanford.edu
• Comment stsetch SNF 2011-08-18 16:04:02: Qual check after report of low ER   latta at snf.stanford.edu
• Comment stsetch SNF 2011-08-30 15:07:13: New 0-ring for the holder needed   latta at snf.stanford.edu
• Problem stsetch SNF 2011-07-19 01:45:04: Severe grass formed   latta at snf.stanford.edu
• Problem stsetch SNF 2011-08-07 12:37:00: later etching   mtan at snf.stanford.edu
• Problem stsetch SNF 2011-08-07 12:37:00: later etching   latta at snf.stanford.edu
• Problem stsetch SNF 2011-08-11 15:20:19: platen power out of tolerance   mtan at snf.stanford.edu
• Problem stsetch SNF 2011-08-11 15:20:19: platen power out of tolerance   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2011-08-12 10:59:44: coil out of tolerance   mtan at snf.stanford.edu
• Problem stsetch SNF 2011-08-12 10:59:44: coil out of tolerance   latta at snf.stanford.edu
• Problem stsetch SNF 2011-08-17 18:11:12: drop in etch rate   mtan at snf.stanford.edu
• Problem stsetch SNF 2011-08-17 18:11:12: drop in etch rate   latta at snf.stanford.edu
• Problem stsetch SNF 2011-08-26 20:45:03: Wafer broken in the chamber   barlian at snf.stanford.edu
• Problem stsetch SNF 2011-08-26 20:45:03: Wafer broken in the chamber   cbaxter at snf.stanford.edu
• Shutdown stsetch SNF 2011-08-02 12:02:29: wafer broken in chamber, please take out the broken pieces for me.   xzhuan1 at snf.stanford.edu
• Shutdown stsetch SNF 2011-08-02 12:02:29: wafer broken in chamber, please take out the broken pieces for me.   mdickey at snf.stanford.edu
• Shutdown stsetch SNF 2011-08-06 11:47:33: Wafer Broke in Chamber   ehsans at snf.stanford.edu
• Shutdown stsetch SNF 2011-08-06 11:47:33: Wafer Broke in Chamber   cbaxter at snf.stanford.edu

Last message date: Tue Aug 30 15:07:13 PDT 2011
Archived on: Fri Jan 11 13:11:27 PST 2013

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