From cduchat at snf.stanford.edu Fri Dec 2 20:17:41 2011 From: cduchat at snf.stanford.edu (cduchat at snf.stanford.edu) Date: Fri, 2 Dec 2011 20:17:41 -0800 Subject: Comment stsetch SNF 2011-12-02 20:17:41: wafer loading is often very slow Message-ID: The wafer loading arm is often (about one time over four) slowing and sometimes stopping during the "entry" phase. It is not a real problem but it slows a little bit more a usually long work... Wafer unloading and return of the arm to its "normal" position are still performed at a normal speed. From cduchat at snf.stanford.edu Fri Dec 2 21:54:07 2011 From: cduchat at snf.stanford.edu (cduchat at snf.stanford.edu) Date: Fri, 2 Dec 2011 21:54:07 -0800 Subject: Comment stsetch SNF 2011-12-02 21:54:06: wafer loading speed: rectificative Message-ID: The unloading is also slow, still for the "entry" phase, not for the return. The frequence of this "problem" is more for one move over two. From xzhuan1 at snf.stanford.edu Sun Dec 4 10:43:33 2011 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sun, 4 Dec 2011 10:43:33 -0800 Subject: Problem stsetch SNF 2011-12-04 10:43:32: cannot start etch process Message-ID: after loading the wafer, the process is stuck at the "standby" stage, aparently waiting for the turbo to reach speed. Tried several times and was never able to start etch process. From eszilagy at snf.stanford.edu Sun Dec 4 18:34:24 2011 From: eszilagy at snf.stanford.edu (eszilagy at snf.stanford.edu) Date: Sun, 4 Dec 2011 18:34:24 -0800 Subject: Problem stsetch SNF 2011-12-04 18:34:24: loading arm was stuck temporarily Message-ID: While loading a wafer, the loading arm became stuck temporarily before loading the wafer. Not sure if this was a one time occurrence. From cbaxter at snf.stanford.edu Sun Dec 4 18:47:59 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Dec 2011 18:47:59 -0800 Subject: Comment stsetch SNF 2011-12-04 18:47:59: Turbo Pump Message-ID: The turbo pump shutoff, re-start tubro .. From emazz86 at snf.stanford.edu Mon Dec 5 11:06:20 2011 From: emazz86 at snf.stanford.edu (emazz86 at snf.stanford.edu) Date: Mon, 5 Dec 2011 11:06:20 -0800 Subject: Shutdown stsetch SNF 2011-12-05 11:06:20: Compressed Air Fault Message-ID: Ran DEEP process. After 70 min, there was a compressed air fault, but I didn't come back to find it until after 105 min. Cleared fault alarm, but it happened again. Cleared fault again, retreived wafer. Was advised to shut tool down. From eenriquez at snf.stanford.edu Mon Dec 5 12:23:14 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Dec 2011 12:23:14 -0800 Subject: Shutdown stsetch SNF 2011-12-05 11:06:20: Compressed Air Fault Message-ID: Reset the system. Ran DEEP recipe with no problems. From eszilagy at snf.stanford.edu Tue Dec 6 06:11:23 2011 From: eszilagy at snf.stanford.edu (eszilagy at snf.stanford.edu) Date: Tue, 6 Dec 2011 06:11:23 -0800 Subject: Problem stsetch SNF 2011-12-06 06:11:22: compressed air fault Message-ID: Another compressed air fault. System won't allow unloading wafer. From mislam at snf.stanford.edu Tue Dec 6 23:30:59 2011 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 6 Dec 2011 23:30:59 -0800 Subject: Problem stsetch SNF 2011-12-06 23:30:59: Load arm movement is sluggish Message-ID: It stops intermittently From latta at snf.stanford.edu Wed Dec 7 16:59:51 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 16:59:51 -0800 Subject: Comment stsetch SNF 2011-05-11 15:15:04: Update high leak rate Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 17:00:00 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 17:00:00 -0800 Subject: Comment stsetch SNF 2011-09-04 21:32:02: DO NOT RESET THE TOOL Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 17:00:13 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 17:00:13 -0800 Subject: Comment stsetch SNF 2011-11-01 16:00:43: Nov qual Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 17:00:36 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 17:00:36 -0800 Subject: Problem stsetch SNF 2011-12-04 10:43:32: cannot start etch process Message-ID: archived From eenriquez at snf.stanford.edu Wed Dec 14 17:05:25 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Dec 2011 17:05:25 -0800 Subject: Shutdown stsetch SNF 2011-12-14 17:05:25: Scheduled shutdown Message-ID: