Comment stsetch SNF 2011-12-02 20:17:41: wafer loading is often very slow

cduchat at snf.stanford.edu cduchat at snf.stanford.edu
Fri Dec 2 20:17:41 PST 2011


The wafer loading arm is often (about one time over four) slowing and sometimes stopping during the "entry" phase.
It is not a real problem but it slows a little bit more a usually long work...
Wafer unloading and return of the arm to its "normal" position are still performed at a normal speed.




More information about the stsetch-pcs mailing list