Problem stsetch SNF 2011-12-04 10:43:32: cannot start etch process

xzhuan1 at xzhuan1 at
Sun Dec 4 10:43:33 PST 2011

after loading the wafer, the process is stuck at the "standby" stage, aparently waiting for the turbo to reach speed. Tried several times and was never able to start etch process.

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