Problem stsetch SNF 2011-12-04 10:43:32: cannot start etch process

xzhuan1 at snf.stanford.edu xzhuan1 at snf.stanford.edu
Sun Dec 4 10:43:33 PST 2011


after loading the wafer, the process is stuck at the "standby" stage, aparently waiting for the turbo to reach speed. Tried several times and was never able to start etch process.




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