Shutdown stsetch SNF 2011-12-05 11:06:20: Compressed Air Fault

emazz86 at snf.stanford.edu emazz86 at snf.stanford.edu
Mon Dec 5 11:06:20 PST 2011


Ran DEEP process. After 70 min, there was a compressed air fault, but I didn't come back to find it until after 105 min. Cleared fault alarm, but it happened again. Cleared fault again, retreived wafer. Was advised to shut tool down. 




More information about the stsetch-pcs mailing list