Shutdown stsetch SNF 2011-12-05 11:06:20: Compressed Air Fault

emazz86 at emazz86 at
Mon Dec 5 11:06:20 PST 2011

Ran DEEP process. After 70 min, there was a compressed air fault, but I didn't come back to find it until after 105 min. Cleared fault alarm, but it happened again. Cleared fault again, retreived wafer. Was advised to shut tool down. 

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