Problem stsetch SNF 2011-12-06 06:11:22: compressed air fault

eszilagy at snf.stanford.edu eszilagy at snf.stanford.edu
Tue Dec 6 06:11:23 PST 2011

Previous message: Shutdown stsetch SNF 2011-12-05 11:06:20: Compressed Air Fault
Next message: Problem stsetch SNF 2011-12-06 23:30:59: Load arm movement is sluggish
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Another compressed air fault. System won't allow unloading wafer.

Previous message: Shutdown stsetch SNF 2011-12-05 11:06:20: Compressed Air Fault
Next message: Problem stsetch SNF 2011-12-06 23:30:59: Load arm movement is sluggish
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list