From ashutosh at snf.stanford.edu Fri Feb 4 10:47:45 2011 From: ashutosh at snf.stanford.edu (ashutosh at snf.stanford.edu) Date: Fri, 4 Feb 2011 10:47:45 -0800 Subject: Problem stsetch SNF 2011-02-04 10:47:44: broken wafer inside Message-ID: Wafer broke during DRIE. Still on the chuck. Please do not attempt to unload From ashutosh at snf.stanford.edu Fri Feb 4 11:04:50 2011 From: ashutosh at snf.stanford.edu (ashutosh at snf.stanford.edu) Date: Fri, 4 Feb 2011 11:04:50 -0800 Subject: Shutdown stsetch SNF 2011-02-04 11:04:49: broken wafer inside Message-ID: The wafer broke during DRIE. So I haven't tried to unload it. Please don't unload. thanks. From eenriquez at snf.stanford.edu Fri Feb 4 14:18:10 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Feb 2011 14:18:10 -0800 Subject: Shutdown stsetch SNF 2011-02-04 11:04:49: broken wafer inside Message-ID: Recovered user's wafer. Cleaned the electrode and ran an O2 plasma. From eenriquez at snf.stanford.edu Fri Feb 4 14:18:15 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Feb 2011 14:18:15 -0800 Subject: Problem stsetch SNF 2011-02-04 10:47:44: broken wafer inside Message-ID: Recovered user's wafer. Cleaned the electrode and ran an O2 plasma. From ashutosh at snf.stanford.edu Thu Feb 10 16:43:48 2011 From: ashutosh at snf.stanford.edu (ashutosh at snf.stanford.edu) Date: Thu, 10 Feb 2011 16:43:48 -0800 Subject: Shutdown stsetch SNF 2011-02-10 16:43:47: Broken wafer inside Message-ID: Please do not unload From cbaxter at snf.stanford.edu Thu Feb 10 17:36:41 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 10 Feb 2011 17:36:41 -0800 Subject: Comment stsetch SNF 2011-02-10 17:36:39: Turbo problem Message-ID: Recovered the broken wafer inside the chamnber, but now the turbo pump will spin up to speed... From eenriquez at snf.stanford.edu Fri Feb 11 10:09:57 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Feb 2011 10:09:57 -0800 Subject: Shutdown stsetch SNF 2011-02-10 16:43:47: Broken wafer inside Message-ID: Recovered the wafer and placed the pieces in the user's holder. Cleaned the chamber. From eenriquez at snf.stanford.edu Fri Feb 11 10:11:11 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Feb 2011 10:11:11 -0800 Subject: Comment stsetch SNF 2011-02-10 17:36:39: Turbo problem Message-ID: The turbo does not spin up. Replaced the turbo and ran an O2 plasma. Nancy will run a qual. From dongrip at snf.stanford.edu Sat Feb 12 19:55:56 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sat, 12 Feb 2011 19:55:56 -0800 Subject: Problem stsetch SNF 2011-02-12 19:55:55: helium looks leaking. Message-ID: Flow rate was monitored during the etch, and I observed big fluctuations in the flow rate (2-5), which may imply the helium leaking on the backside. From eenriquez at snf.stanford.edu Wed Feb 16 11:12:15 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Feb 2011 11:12:15 -0800 Subject: Problem stsetch SNF 2011-02-12 19:55:55: helium looks leaking. Message-ID: Replaced the lip seal during the monthly PM From eenriquez at snf.stanford.edu Wed Feb 16 11:12:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Feb 2011 11:12:51 -0800 Subject: Comment stsetch SNF 2011-02-16 11:12:51: Completed the monthly pm Message-ID: Replaced the lip seal. From dongrip at snf.stanford.edu Sat Feb 26 21:13:05 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sat, 26 Feb 2011 21:13:05 -0800 Subject: Problem stsetch SNF 2011-02-26 21:13:05: compressed air interlock error Message-ID: During my etch (smoodeep), I encountered compressed air interlock error, which stopped my process. Weird ring patterns were observed at the edge of the wafer. From haemmerl at snf.stanford.edu Sun Feb 27 12:04:32 2011 From: haemmerl at snf.stanford.edu (haemmerl at snf.stanford.edu) Date: Sun, 27 Feb 2011 12:04:32 -0800 Subject: Problem stsetch SNF 2011-02-27 12:04:32: Password Message-ID: Software has been quit. Password required... From shott at snf.stanford.edu Sun Feb 27 12:43:46 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 27 Feb 2011 12:43:46 -0800 Subject: Problem stsetch SNF 2011-02-27 12:04:32: Password Message-ID: I was able to enter administrative mode with a password that I know and then, from there, was allowed to get the software into standard mode without prompting for a further password. I don't know if this is the standard way that this is or should be done and will check with Elmer, Mary, and Nancy to make sure that I didn't screw anything up. Of course, this may not deal with the "compressed air" problem reported elsewhere .... but we do seem to have building-wide compressed air. Thanks, John From srikantv at snf.stanford.edu Mon Feb 28 00:15:29 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Mon, 28 Feb 2011 00:15:29 -0800 Subject: Problem stsetch SNF 2011-02-28 00:15:28: unable to enter standard mode Message-ID: could not load wafer From shott at snf.stanford.edu Mon Feb 28 06:13:39 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 28 Feb 2011 06:13:39 -0800 Subject: Problem stsetch SNF 2011-02-28 00:15:28: unable to enter standard mode Message-ID: Moved to Administrative mode .... while this is counterintuitive, I'm told that this is the standard operating mode. John From cbaxter at snf.stanford.edu Mon Feb 28 09:55:55 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 28 Feb 2011 09:55:55 -0800 Subject: Problem stsetch SNF 2011-02-26 21:13:05: compressed air interlock error Message-ID: