Problem stsetch SNF 2011-02-12 19:55:55: helium looks leaking.

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Sat Feb 12 19:55:56 PST 2011


Flow rate was monitored during the etch, and I observed big fluctuations in the flow rate (2-5), which may imply the helium leaking on the backside. 




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