Problem stsetch SNF 2011-02-26 21:13:05: compressed air interlock error

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Sat Feb 26 21:13:05 PST 2011


During my etch (smoodeep), I encountered compressed air interlock error, which stopped my process. Weird ring patterns were observed at the edge of the wafer. 




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