From latta at snf.stanford.edu Thu Jul 7 11:59:55 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Jul 2011 11:59:55 -0700 Subject: Comment stsetch SNF 2011-07-07 11:59:54: He flow = 4.00 Message-ID: From ehsans at snf.stanford.edu Thu Jul 7 18:53:16 2011 From: ehsans at snf.stanford.edu (ehsans at snf.stanford.edu) Date: Thu, 7 Jul 2011 18:53:16 -0700 Subject: Shutdown stsetch SNF 2011-07-07 18:53:16: Cannot Operate System Message-ID: The system quit out of the controller program. Another experienced user and I attempted to reopen the controller program but a "communications error" was produced upon openning the program, and the program would shut down again. From eenriquez at snf.stanford.edu Fri Jul 8 09:10:07 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Jul 2011 09:10:07 -0700 Subject: Shutdown stsetch SNF 2011-07-07 18:53:16: Cannot Operate System Message-ID: Reset the computer. From eenriquez at snf.stanford.edu Fri Jul 8 09:11:32 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Jul 2011 09:11:32 -0700 Subject: Comment stsetch SNF 2011-07-07 11:59:54: He flow = 4.00 Message-ID: Adjusted the helium bleed flow. Now the helium flow during process is about 3.7 From eenriquez at snf.stanford.edu Thu Jul 14 13:26:59 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jul 2011 13:26:59 -0700 Subject: Comment stsetch SNF 2011-05-26 12:07:08: He flow getting to 3.9 Message-ID: Cleaned the lip seal. From dongrip at snf.stanford.edu Fri Jul 15 23:48:40 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Fri, 15 Jul 2011 23:48:40 -0700 Subject: Shutdown stsetch SNF 2011-07-15 23:48:39: Wafer broken inside... Message-ID: Wafer still there...Sorry for your inconvenience... From cbaxter at snf.stanford.edu Mon Jul 18 09:20:31 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 18 Jul 2011 09:20:31 -0700 Subject: Shutdown stsetch SNF 2011-07-15 23:48:39: Wafer broken inside... Message-ID: Mike and I cleaned up the broken wafer inside the chamber and ran 30mins o2 clean. From dongrip at snf.stanford.edu Tue Jul 19 01:45:04 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Tue, 19 Jul 2011 01:45:04 -0700 Subject: Problem stsetch SNF 2011-07-19 01:45:04: Severe grass formed Message-ID: I got huge grass formed after 10 min smoodeep. With exactly same masking, I couldn't see this one week ago. From egarnett at snf.stanford.edu Wed Jul 20 11:38:50 2011 From: egarnett at snf.stanford.edu (egarnett at snf.stanford.edu) Date: Wed, 20 Jul 2011 11:38:50 -0700 Subject: Problem stsetch SNF 2011-07-20 11:38:49: holder stuck in chamber Message-ID: When I loaded my wafer the whole wafer holder stayed in the chamber and now it will not come out. Not sure what happened but it is not usable right now as far as I can tell. From eenriquez at snf.stanford.edu Wed Jul 20 15:15:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Jul 2011 15:15:41 -0700 Subject: Problem stsetch SNF 2011-07-20 11:38:49: holder stuck in chamber Message-ID: Recovered the stuck wafer carrier. Cycled a wafer without any problems. From malekos at snf.stanford.edu Wed Jul 27 13:17:12 2011 From: malekos at snf.stanford.edu (malekos at snf.stanford.edu) Date: Wed, 27 Jul 2011 13:17:12 -0700 Subject: Shutdown stsetch SNF 2011-07-27 13:17:12: broke wafer inside chamber Message-ID: From eenriquez at snf.stanford.edu Wed Jul 27 14:24:15 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jul 2011 14:24:15 -0700 Subject: Shutdown stsetch SNF 2011-07-27 13:17:12: broke wafer inside chamber Message-ID: Recovered the wafer pieces and cleaned the chamber. Ran O2 plasma.