Problem stsetch SNF 2011-07-20 11:38:49: holder stuck in chamber

egarnett at snf.stanford.edu egarnett at snf.stanford.edu
Wed Jul 20 11:38:50 PDT 2011


When I loaded my wafer the whole wafer holder stayed in the chamber and now it will not come out.  Not sure what happened but it is not usable right now as far as I can tell.




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