From tasyurek at snf.stanford.edu  Tue Jun  7 18:39:36 2011
From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu)
Date: Tue, 7 Jun 2011 18:39:36 -0700
Subject: Problem stsetch SNF 2011-06-07 18:39:35: broke wafer in loadlock
Message-ID: <mailman.2416.1357938662.25867.stsetch-pcs@snf.stanford.edu>

dropped wafer and it broke it many pieces, tried to clean up but there are still pieces I can't reach.



From eenriquez at snf.stanford.edu  Wed Jun  8 14:09:19 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 8 Jun 2011 14:09:19 -0700
Subject: Problem stsetch SNF 2011-06-07 18:39:35: broke wafer in loadlock
Message-ID: <mailman.2417.1357938662.25867.stsetch-pcs@snf.stanford.edu>

Cleaned the load lock and ran O2 plasma.



From latta at snf.stanford.edu  Thu Jun  9 11:07:22 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 9 Jun 2011 11:07:22 -0700
Subject: Problem stsetch SNF 2011-06-09 11:07:21: He flow at 4.09
Message-ID: <mailman.2418.1357938662.25867.stsetch-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Jun 10 10:51:15 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 10 Jun 2011 10:51:15 -0700
Subject: Problem stsetch SNF 2011-06-09 11:07:21: He flow at 4.09
Message-ID: <mailman.2419.1357938662.25867.stsetch-pcs@snf.stanford.edu>

Cleaned the lip seal.  Now He leak rate is around 3.8.



From fungus at snf.stanford.edu  Fri Jun 10 15:15:18 2011
From: fungus at snf.stanford.edu (fungus at snf.stanford.edu)
Date: Fri, 10 Jun 2011 15:15:18 -0700
Subject: Shutdown stsetch SNF 2011-06-10 15:15:18: wafer broke
Message-ID: <mailman.2420.1357938662.25867.stsetch-pcs@snf.stanford.edu>

Wafer broke inside chamber
Could not retrieve with unload.



From cbaxter at snf.stanford.edu  Sun Jun 12 22:24:18 2011
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sun, 12 Jun 2011 22:24:18 -0700
Subject: Shutdown stsetch SNF 2011-06-10 15:15:18: wafer broke
Message-ID: <mailman.2421.1357938662.25867.stsetch-pcs@snf.stanford.edu>

Recovered broken wafer on chamber. I ran 30mins o2 clean
plasma.



From eenriquez at snf.stanford.edu  Thu Jun 23 09:46:25 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 23 Jun 2011 09:46:25 -0700
Subject: Comment stsetch SNF 2011-05-26 16:17:03: Another qual
Message-ID: <mailman.2422.1357938662.25867.stsetch-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Thu Jun 23 09:46:42 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 23 Jun 2011 09:46:42 -0700
Subject: Comment stsetch SNF 2011-06-23 09:46:41: Completed monthly PM
Message-ID: <mailman.2423.1357938662.25867.stsetch-pcs@snf.stanford.edu>




From ndeshmuk at snf.stanford.edu  Thu Jun 23 14:25:56 2011
From: ndeshmuk at snf.stanford.edu (ndeshmuk at snf.stanford.edu)
Date: Thu, 23 Jun 2011 14:25:56 -0700
Subject: Shutdown stsetch SNF 2011-06-23 14:25:56: broken wafer 
Message-ID: <mailman.2424.1357938662.25867.stsetch-pcs@snf.stanford.edu>

My wafer broke in the chamber. 



From eenriquez at snf.stanford.edu  Thu Jun 23 15:14:38 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 23 Jun 2011 15:14:38 -0700
Subject: Shutdown stsetch SNF 2011-06-23 14:25:56: broken wafer 
Message-ID: <mailman.2425.1357938662.25867.stsetch-pcs@snf.stanford.edu>

Recovered the user's wafer.  Cycled wafer and ran Deep recipe.