Comment stsetch SNF 2011-03-04 16:07:57: Mar quals

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Mar 4 16:07:57 PST 2011


O2CLEAN run for 30 min, DEEP run for 15 min for seasoning
 Three wafersrun for 10 min, DEEP,  with the following results; 
1 Si ER = 1.82um/min, PR ER = 199A, Sel Si : PR = 91 : 1
2 Si ER = 1.88um/min, PR ER = 199A, Sel Si : PR = 94 : 1
3 Si ER = 1.82um/min, PR ER = 210A, Sel Si : PR = 87 : 1




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