Problem stsetch SNF 2011-03-13 07:06:32: Error and Big Jumps in Helium Flow

ehsans at snf.stanford.edu ehsans at snf.stanford.edu
Sun Mar 13 07:06:33 PDT 2011


The Helium flow jumped wildly between 2.5 and 5.5. I also got an error: "ICP Process DEEP on 7673 failed - Interlock Tripped" After getting the error I took my wafer out, put it back in, and the process went well. The Helium problem persisted over the four wafers that I etched. My etch rate was 3.4 um/min using DEEP.




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