Problem stsetch SNF 2011-03-15 15:42:29: Frequent interlock problems

bchui at snf.stanford.edu bchui at snf.stanford.edu
Tue Mar 15 15:42:30 PDT 2011


My wafer and other users' wafers are both encountering frequent interlock trip errors leading to the recipe being aborted.  The frequency is about every 1 to 2 hours.  In one case the "DI conductivity interlock alarm" error msg showed.




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