Shutdown stsetch SNF 2011-03-15 18:22:59: wafer in the handler

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Mar 16 09:12:09 PDT 2011


Found a piece of lint free paper on the load lock o-ring.  The LL was unable to pump down.  Removed piece of paper.




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