March 2011 Archives by author

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Starting: Thu Mar 3 18:05:40 PST 2011
Ending: Thu Mar 17 14:18:45 PDT 2011
Messages: 33

• Shutdown stsetch SNF 2011-03-03 18:05:40: ICP transfer mode entry failed communication lost   ashutosh at snf.stanford.edu
• Problem stsetch SNF 2011-03-04 16:13:07: ICP Process failed interlock tripped   ashutosh at snf.stanford.edu
• Shutdown stsetch SNF 2011-03-07 16:02:51: broken wafer inside   ashutosh at snf.stanford.edu
• Shutdown stsetch SNF 2011-03-15 18:22:59: wafer in the handler   ashutosh at snf.stanford.edu
• Problem stsetch SNF 2011-03-15 15:42:29: Frequent interlock problems   bchui at snf.stanford.edu
• Problem stsetch SNF 2011-03-04 16:13:07: ICP Process failed interlock tripped   cbaxter at snf.stanford.edu
• Shutdown stsetch SNF 2011-03-03 18:05:40: ICP transfer mode entry failed communication lost   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2011-01-26 11:16:09: Replaced Freon 318 cylinder   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2011-03-07 09:42:38: Completed monthly PM   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2011-03-07 12:54:38: Updated qual charts   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2011-03-07 16:02:51: broken wafer inside   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2011-03-09 09:15:45: Maintenance work   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2011-03-13 07:06:32: Error and Big Jumps in Helium Flow   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2011-03-14 13:58:09: He flow keeps fluctuating during etch   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2011-03-15 18:22:59: wafer in the handler   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2011-03-16 19:27:48: Update interlock problem   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2011-03-15 15:42:29: Frequent interlock problems   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2011-03-16 19:27:48: Update interlock problem   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2011-03-17 05:19:34: same interlock problem   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2010-11-01 21:49:36: RF coil generator overheat   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2011-01-12 17:40:38: Quals after shutdown   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2011-02-16 11:12:51: Completed the monthly pm   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2011-03-13 07:06:32: Error and Big Jumps in Helium Flow   ehsans at snf.stanford.edu
• Problem stsetch SNF 2011-03-14 13:58:09: He flow keeps fluctuating during etch   jasmine at snf.stanford.edu
• Comment stsetch SNF 2011-01-26 10:12:39: Completed monthly PM   latta at snf.stanford.edu
• Comment stsetch SNF 2011-03-04 16:07:57: Mar quals   latta at snf.stanford.edu
• Problem stsetch SNF 2010-10-30 01:00:18: Grass, grass, grass   latta at snf.stanford.edu
• Comment stsetch SNF 2010-11-03 12:15:19: grass only for > 1-2 hour etches   latta at snf.stanford.edu
• Comment stsetch SNF 2010-12-01 18:36:17: Update grass problem   latta at snf.stanford.edu
• Problem stsetch SNF 2010-07-17 07:46:20: Wafer-to-wafer etch rate is not constant   latta at snf.stanford.edu
• Comment stsetch SNF 2010-08-20 16:17:00: Results for PR etch rate tests   latta at snf.stanford.edu
• Problem stsetch SNF 2010-11-01 20:55:59: Etch rate decreasing + grass   latta at snf.stanford.edu
• Problem stsetch SNF 2011-03-17 05:19:34: same interlock problem   wonukjo at snf.stanford.edu

Last message date: Thu Mar 17 14:18:45 PDT 2011
Archived on: Fri Jan 11 13:11:26 PST 2013

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