From eenriquez at snf.stanford.edu Tue Nov 1 11:34:30 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Nov 2011 11:34:30 -0700 Subject: Shutdown stsetch SNF 2011-10-31 23:25:29: Wafer Stuck In Chamber Message-ID: Recovered the user's wafer and O2 plasma. From latta at snf.stanford.edu Tue Nov 1 15:59:57 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 1 Nov 2011 15:59:57 -0700 Subject: Problem stsetch SNF 2011-10-11 18:31:10: Qual after repair (lifter burr polished off) Message-ID: new qual run From latta at snf.stanford.edu Tue Nov 1 16:00:44 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 1 Nov 2011 16:00:44 -0700 Subject: Comment stsetch SNF 2011-11-01 16:00:43: Nov qual Message-ID: DEEP 00:10:00 Si ER =2.01um/min PR ER = 256A/min Sel = 78:1 From latta at snf.stanford.edu Tue Nov 1 16:01:01 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 1 Nov 2011 16:01:01 -0700 Subject: Comment stsetch SNF 2011-10-11 13:18:20: He flow during RF on = 4.02 Message-ID: back to 3.88 From latta at snf.stanford.edu Tue Nov 1 16:01:31 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 1 Nov 2011 16:01:31 -0700 Subject: Comment stsetch SNF 2011-10-31 15:35:42: Process timer not counting down Message-ID: archived From latta at snf.stanford.edu Tue Nov 1 16:02:03 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 1 Nov 2011 16:02:03 -0700 Subject: Comment stsetch SNF 2011-10-14 11:18:15: New ring for holder- Yea! Message-ID: new ring bent- more ordered From egarnett at snf.stanford.edu Fri Nov 4 09:05:51 2011 From: egarnett at snf.stanford.edu (egarnett at snf.stanford.edu) Date: Fri, 4 Nov 2011 09:05:51 -0700 Subject: Problem stsetch SNF 2011-11-04 09:05:50: computer frozen Message-ID: I accidentally hit run process before loading my wafer. Tried to abort right away but program seems to be frozen. Sorry, please help me. From eenriquez at snf.stanford.edu Fri Nov 4 15:37:23 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Nov 2011 15:37:23 -0700 Subject: Problem stsetch SNF 2011-11-04 09:05:50: computer frozen Message-ID: Somebody defrosted the computer. Now running fine. From cduchat at snf.stanford.edu Fri Nov 11 14:07:36 2011 From: cduchat at snf.stanford.edu (cduchat at snf.stanford.edu) Date: Fri, 11 Nov 2011 14:07:36 -0800 Subject: Shutdown stsetch SNF 2011-11-11 14:07:36: turbo pump failure Message-ID: The turbo pump stopped when I tryed to load my first wafer. From eenriquez at snf.stanford.edu Fri Nov 11 14:39:02 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Nov 2011 14:39:02 -0800 Subject: Shutdown stsetch SNF 2011-11-11 14:07:36: turbo pump failure Message-ID: Restarted the turbo pump and cycled a wafer with no problems. From nharjee at snf.stanford.edu Tue Nov 15 15:11:49 2011 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Tue, 15 Nov 2011 15:11:49 -0800 Subject: Comment stsetch SNF 2011-11-15 15:11:48: Unusual observations Message-ID: When using the Al holder and a blank Si test wafer, I observed the following: 1. The backside He flow oscillates between 2.7 and 5.4 (not sure if the units are sccm). 2. During a 10 min O2 clean, plasma color changed from expected grey-blue to slightly purplish which suggests the presence of another gas. I wiped off the bottom of the holder and the o-ring prior to use so a particle causing a He leak is unlikely. From barlian at snf.stanford.edu Thu Nov 17 14:11:09 2011 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Thu, 17 Nov 2011 14:11:09 -0800 Subject: Comment stsetch SNF 2011-11-17 14:11:09: confirming nharjee above Message-ID: I'm running DEEP recipe and measured oscillating He flow is between 2.6-5.4. I'm using the Al holder and a backing wafer since I'm etching through more than 100um. Like nharjee, I cleaned the Al holder too. From dongrip at snf.stanford.edu Sun Nov 20 05:58:04 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 20 Nov 2011 05:58:04 -0800 Subject: Problem stsetch SNF 2011-11-20 05:58:03: He back flow leak? Message-ID: As previous users mentioned, flow rate fluctuates a lot, and after the etching, a weird ring pattern was observed on my wafer. He back flow leaks are suspected... From eenriquez at snf.stanford.edu Mon Nov 21 12:07:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Nov 2011 12:07:47 -0800 Subject: Problem stsetch SNF 2011-11-20 05:58:03: He back flow leak? Message-ID: Helium flow is stable at 3.8 (during process) when running a bare silicon wafer. The flow however is unstable when using the carrier. This is normal and is inherent in the design of the carrier. From eenriquez at snf.stanford.edu Mon Nov 21 12:08:28 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Nov 2011 12:08:28 -0800 Subject: Comment stsetch SNF 2011-11-17 14:11:09: confirming nharjee above Message-ID: Helium flow is stable at 3.8 (during process) when running a bare silicon wafer. The flow however is unstable when using the carrier. This is normal and is inherent in the design of the carrier. From eenriquez at snf.stanford.edu Mon Nov 21 12:08:39 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Nov 2011 12:08:39 -0800 Subject: Comment stsetch SNF 2011-11-15 15:11:48: Unusual observations Message-ID: Helium flow is stable at 3.8 (during process) when running a bare silicon wafer. The flow however is unstable when using the carrier. This is normal and is inherent in the design of the carrier. From mislam at snf.stanford.edu Sat Nov 26 00:48:15 2011 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 26 Nov 2011 00:48:15 -0800 Subject: Problem stsetch SNF 2011-11-26 00:48:15: communication lost Message-ID: Could not unload my wafer due to communication error. From cduchat at snf.stanford.edu Sat Nov 26 13:11:56 2011 From: cduchat at snf.stanford.edu (cduchat at snf.stanford.edu) Date: Sat, 26 Nov 2011 13:11:56 -0800 Subject: Problem stsetch SNF 2011-11-26 13:11:55: communication problem still present Message-ID: The computer is still not able to communicate with the apparatus. Impossible to unload Mislam's wafer or to do anything. From shott at snf.stanford.edu Sun Nov 27 08:28:57 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 27 Nov 2011 08:28:57 -0800 Subject: Shutdown stsetch SNF 2011-11-27 08:28:56: Blown CDA line ... Message-ID: The CDA line in the basement, that should be the house nitrogen line, has blown and is making a loud noise. After confirming with the handheld oxygen meter (so that I didn't because a casaulty) that it was CDA and not nitrogen leaking), I've shut off the valve. I'm now in the process of connecting this to what it should have been connected ... house nitrogen. While I'm not proud of using Parflex tubing, it's the only thing that I have available on a Sunday morning. John From shott at snf.stanford.edu Sun Nov 27 09:20:35 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 27 Nov 2011 09:20:35 -0800 Subject: Shutdown stsetch SNF 2011-11-27 08:28:56: Blown CDA line ... Message-ID: Replaced blown CDA line with a nitrogen line run in blue parflex from the nearest nitrogen house supply to the pump rack and electronic box for stsetch. This does three things: 1. Fixes an error that likely occurred 20 years ago: the pump and cabinet purge should have always been connected to house nitrogen instead of to CDA. 2. It fixes the blown line. 3. It gets rid of the CDA usage close to the epi burn box. AGC will be removing that on Monday and needed that line moved anyhow. Note: I think that it would be worthwhile to find something better than Parflex for flexible connections for house nitrogen, CDA, and various water lines. This stuff always breaks. There must be a more reliable material. Thanks, John From eenriquez at snf.stanford.edu Mon Nov 28 09:05:02 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 09:05:02 -0800 Subject: Problem stsetch SNF 2011-11-26 13:11:55: communication problem still present Message-ID: Another user was able to reset communication. Ran a process without any problems. From eenriquez at snf.stanford.edu Mon Nov 28 09:05:10 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 09:05:10 -0800 Subject: Problem stsetch SNF 2011-11-26 00:48:15: communication lost Message-ID: Another user was able to reset communication. Ran a process without any problems.