Shutdown stsetch SNF 2011-10-31 23:25:29: Wafer Stuck In Chamber
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Nov 1 11:34:30 PDT 2011
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Problem stsetch SNF 2011-10-11 18:31:10: Qual after repair (lifter burr polished off)
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Recovered the user's wafer and O2 plasma.
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Problem stsetch SNF 2011-10-11 18:31:10: Qual after repair (lifter burr polished off)
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