Comment stsetch SNF 2011-11-17 14:11:09: confirming nharjee above

barlian at snf.stanford.edu barlian at snf.stanford.edu
Thu Nov 17 14:11:09 PST 2011


I'm running DEEP recipe and measured oscillating He flow is between 2.6-5.4. I'm using the Al holder and a backing wafer since I'm etching through more than 100um. Like nharjee, I cleaned the Al holder too. 




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