Problem stsetch SNF 2011-11-20 05:58:03: He back flow leak?

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Sun Nov 20 05:58:04 PST 2011


As previous users mentioned, flow rate fluctuates a lot, and after the etching, a weird ring pattern was observed on my wafer. He back flow leaks are suspected...




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