From eenriquez at snf.stanford.edu Mon Oct 3 10:41:55 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Oct 2011 10:41:55 -0700 Subject: Shutdown stsetch SNF 2011-09-30 19:01:21: wafer broken on chuck Message-ID: Cleaned the chamber. Ran O2 plasma. From eszilagy at snf.stanford.edu Mon Oct 3 17:04:15 2011 From: eszilagy at snf.stanford.edu (eszilagy at snf.stanford.edu) Date: Mon, 3 Oct 2011 17:04:15 -0700 Subject: Shutdown stsetch SNF 2011-10-03 17:04:14: broken wafer Message-ID: Wafer broke in etcher. From cbaxter at snf.stanford.edu Mon Oct 3 18:12:30 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 3 Oct 2011 18:12:30 -0700 Subject: Shutdown stsetch SNF 2011-10-03 17:04:14: broken wafer Message-ID: Vented chamber and removed broken wafer chips. Wiped down chamber with ipa and ran O2 clean plasma.. From latta at snf.stanford.edu Tue Oct 4 12:31:17 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 4 Oct 2011 12:31:17 -0700 Subject: Comment stsetch SNF 2011-09-15 15:05:01: Sept qual Message-ID: archived From latta at snf.stanford.edu Tue Oct 4 12:34:07 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 4 Oct 2011 12:34:07 -0700 Subject: Problem stsetch SNF 2011-10-04 12:34:07: Etch rates decresed during qual Message-ID: DEEP 00:10:00 Sept --Si ER =2.02um/min, PR ER = 224A/min, Sel = 90:1 Oct-- Si ER = 1.81, PR ER = 194, Sel = 93 : 1 From eszilagy at snf.stanford.edu Thu Oct 6 17:42:21 2011 From: eszilagy at snf.stanford.edu (eszilagy at snf.stanford.edu) Date: Thu, 6 Oct 2011 17:42:21 -0700 Subject: Shutdown stsetch SNF 2011-10-06 17:42:21: broken wafer Message-ID: From cbaxter at snf.stanford.edu Fri Oct 7 11:52:39 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 7 Oct 2011 11:52:39 -0700 Subject: Shutdown stsetch SNF 2011-10-06 17:42:21: broken wafer Message-ID: Removed broken wafer and wiped down chamber with water and ipa. Ran O2 30mins... From ehsans at snf.stanford.edu Fri Oct 7 18:21:20 2011 From: ehsans at snf.stanford.edu (ehsans at snf.stanford.edu) Date: Fri, 7 Oct 2011 18:21:20 -0700 Subject: Shutdown stsetch SNF 2011-10-07 18:21:19: Wafer cracked in chamber Message-ID: From bchui at snf.stanford.edu Fri Oct 7 21:07:19 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 7 Oct 2011 21:07:19 -0700 Subject: Problem stsetch SNF 2011-10-07 21:07:18: Frequent wafer breakages (amongst several users) Message-ID: I've noticed that a lot of users (including myself, eszilagy and now ehsans) have had their wafers break inside the etch chamber, on three friday evenings in a row. I'm using the same mask as I've been using the past 2 years and the same type of wafers as well. Something seems wrong with the machine--maybe He pressure or clamping force? (My wafers break even while using the Al holder. In one case, a 1mm thick wafer cracked after having been etched 400um, i.e. there was 600um of material left, which should be still a fair amount of material.) --Thanks, Ben C From eenriquez at snf.stanford.edu Mon Oct 10 14:56:48 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Oct 2011 14:56:48 -0700 Subject: Shutdown stsetch SNF 2011-10-07 18:21:19: Wafer cracked in chamber Message-ID: Removed the user's wafer. Found a sharp protrusion on one of the lift pins. Polished the lift pins. Ran the DEEP recipe for 2.5 hours with no problems. From eenriquez at snf.stanford.edu Mon Oct 10 14:56:56 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Oct 2011 14:56:56 -0700 Subject: Problem stsetch SNF 2011-10-07 21:07:18: Frequent wafer breakages (amongst several users) Message-ID: Removed the user's wafer. Found a sharp protrusion on one of the lift pins. Polished the lift pins. Ran the DEEP recipe for 2.5 hours with no problems. From latta at snf.stanford.edu Tue Oct 11 13:18:21 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Oct 2011 13:18:21 -0700 Subject: Comment stsetch SNF 2011-10-11 13:18:20: He flow during RF on = 4.02 Message-ID: From latta at snf.stanford.edu Tue Oct 11 18:28:30 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Oct 2011 18:28:30 -0700 Subject: Problem stsetch SNF 2011-10-04 12:34:07: Etch rates decresed during qual Message-ID: new quals posted- after lifter burr polished off. From latta at snf.stanford.edu Tue Oct 11 18:31:11 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Oct 2011 18:31:11 -0700 Subject: Problem stsetch SNF 2011-10-11 18:31:10: Qual after repair (lifter burr polished off) Message-ID: DEEP 00:10:00 Si ER =1.57um/min PR ER = 174A/min Sel = 90:1 These ERs are actually slower than the qual earlier in Oct. From latta at snf.stanford.edu Tue Oct 11 18:31:28 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Oct 2011 18:31:28 -0700 Subject: Comment stsetch SNF 2011-08-10 18:08:44: Completed monthly PM Message-ID: archived From latta at snf.stanford.edu Tue Oct 11 18:31:42 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Oct 2011 18:31:42 -0700 Subject: Comment stsetch SNF 2011-08-11 11:24:32: qual run after repair Message-ID: archived From latta at snf.stanford.edu Tue Oct 11 18:32:00 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Oct 2011 18:32:00 -0700 Subject: Comment stsetch SNF 2011-08-18 16:04:02: Qual check after report of low ER Message-ID: archived From latta at snf.stanford.edu Tue Oct 11 18:32:21 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Oct 2011 18:32:21 -0700 Subject: Comment stsetch SNF 2011-08-30 15:07:13: New 0-ring for the holder needed Message-ID: o-ring replaced From latta at snf.stanford.edu Fri Oct 14 11:18:15 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 14 Oct 2011 11:18:15 -0700 Subject: Comment stsetch SNF 2011-10-14 11:18:15: New ring for holder- Yea! Message-ID: From ludwig at snf.stanford.edu Fri Oct 21 20:46:38 2011 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Fri, 21 Oct 2011 20:46:38 -0700 Subject: Shutdown stsetch SNF 2011-10-21 20:46:37: TRANSFER ARM BROKE WAFER Message-ID: From cbaxter at snf.stanford.edu Sun Oct 23 21:27:49 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Oct 2011 21:27:49 -0700 Subject: Shutdown stsetch SNF 2011-10-21 20:46:37: TRANSFER ARM BROKE WAFER Message-ID: Found load arm inside the chamber jammed on the carrier ring. Power down the tool and manually move arm out from the chamber, vacuum wafer chips and wiped down chamber with ipa. Ran 30min O2 clean.. From npapte at snf.stanford.edu Mon Oct 24 16:53:04 2011 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Mon, 24 Oct 2011 16:53:04 -0700 Subject: Comment stsetch SNF 2011-10-24 16:53:03: deleted shutdown reports Message-ID: I would request the maintenance staff to not delete the recent shutdown reports. I have noticed that stsetch has been shut down quite frequently in the last few weeks due to wafers breaking in it. However looking at the maintenance log, I cannot get any idea how frequently is this problem occuring or if anything is done to fix it. From bchui at snf.stanford.edu Mon Oct 24 16:54:38 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 24 Oct 2011 16:54:38 -0700 Subject: Shutdown stsetch SNF 2011-10-24 16:54:38: Wafer broke in etch chamber Message-ID: From cbaxter at snf.stanford.edu Mon Oct 24 17:38:03 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 24 Oct 2011 17:38:03 -0700 Subject: Shutdown stsetch SNF 2011-10-24 16:54:38: Wafer broke in etch chamber Message-ID: Removed broken wafer and ran O2 clean... From latta at snf.stanford.edu Tue Oct 25 09:49:47 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 25 Oct 2011 09:49:47 -0700 Subject: Comment stsetch SNF 2011-10-24 16:53:03: deleted shutdown reports Message-ID: informed user of resolved option in coral. From xzhuan1 at snf.stanford.edu Wed Oct 26 13:11:57 2011 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Wed, 26 Oct 2011 13:11:57 -0700 Subject: Shutdown stsetch SNF 2011-10-26 13:11:56: wafer broke during etching Message-ID: need to retrieve wafer pieces from the etch chamber. From eenriquez at snf.stanford.edu Wed Oct 26 15:11:37 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Oct 2011 15:11:37 -0700 Subject: Shutdown stsetch SNF 2011-10-26 13:11:56: wafer broke during etching Message-ID: Clean chamber and ran O2 plasma. User's wafer broke during process. From scrippen at snf.stanford.edu Thu Oct 27 02:24:46 2011 From: scrippen at snf.stanford.edu (scrippen at snf.stanford.edu) Date: Thu, 27 Oct 2011 02:24:46 -0700 Subject: Shutdown stsetch SNF 2011-10-27 02:24:46: wafer broke during etch in chamber Message-ID: From eenriquez at snf.stanford.edu Thu Oct 27 10:19:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 27 Oct 2011 10:19:51 -0700 Subject: Shutdown stsetch SNF 2011-10-27 02:24:46: wafer broke during etch in chamber Message-ID: Cleaned the chamber. From mdickey at snf.stanford.edu Fri Oct 28 06:03:14 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 28 Oct 2011 06:03:14 -0700 Subject: Shutdown stsetch SNF 2011-10-28 06:03:14: tie in Message-ID: Down for flow meter tie in From mdickey at snf.stanford.edu Fri Oct 28 13:44:13 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 28 Oct 2011 13:44:13 -0700 Subject: Shutdown stsetch SNF 2011-10-28 06:03:14: tie in Message-ID: tie in complete From eenriquez at snf.stanford.edu Mon Oct 31 15:35:42 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 31 Oct 2011 15:35:42 -0700 Subject: Comment stsetch SNF 2011-10-31 15:35:42: Process timer not counting down Message-ID: Reset the system. From ehsans at snf.stanford.edu Mon Oct 31 23:25:30 2011 From: ehsans at snf.stanford.edu (ehsans at snf.stanford.edu) Date: Mon, 31 Oct 2011 23:25:30 -0700 Subject: Shutdown stsetch SNF 2011-10-31 23:25:29: Wafer Stuck In Chamber Message-ID: The prongs did not grab the wafer and holder properly so the arm pulled the wafer out of place. The wafer is now in the chamber, but in the way of the arm, and cannot be retrieved. I have placed a wafer holder and tweezers on the machine. Please put the wafer in there after you retrieve it. It does not look broken when using a flash light. I apologize for the inconvenience.