Shutdown stsetch SNF 2011-09-30 19:01:21: wafer broken on chuck
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Oct 3 10:41:55 PDT 2011
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Shutdown stsetch SNF 2011-10-03 17:04:14: broken wafer
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Cleaned the chamber. Ran O2 plasma.
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Shutdown stsetch SNF 2011-10-03 17:04:14: broken wafer
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