Problem stsetch SNF 2011-10-04 12:34:07: Etch rates decresed during qual

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Oct 4 12:34:07 PDT 2011


DEEP 00:10:00 
Sept --Si ER =2.02um/min, PR ER = 224A/min, Sel = 90:1
Oct-- Si ER = 1.81, PR ER = 194, Sel = 93 : 1




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