Shutdown stsetch SNF 2011-10-07 18:21:19: Wafer cracked in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Oct 10 14:56:48 PDT 2011

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Removed the user's wafer.  Found a sharp protrusion on one of the lift pins.  Polished the lift pins.  Ran the DEEP recipe for 2.5 hours with no problems.

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