Problem stsetch SNF 2011-10-07 21:07:18: Frequent wafer breakages (amongst several users)

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Oct 10 14:56:56 PDT 2011


Removed the user's wafer.  Found a sharp protrusion on one of the lift pins.  Polished the lift pins.  Ran the DEEP recipe for 2.5 hours with no problems.




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