Problem stsetch SNF 2011-10-11 18:31:10: Qual after repair (lifter burr polished off)

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Oct 11 18:31:11 PDT 2011

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DEEP 00:10:00 
Si ER =1.57um/min
PR ER = 174A/min
Sel = 90:1
These ERs are actually slower than the qual earlier in Oct.

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