Shutdown stsetch SNF 2011-10-21 20:46:37: TRANSFER ARM BROKE WAFER

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun Oct 23 21:27:49 PDT 2011


Found load arm inside the chamber jammed on the carrier
ring. Power down the tool and manually move arm out from
the chamber, vacuum wafer chips and wiped down chamber
with ipa. Ran 30min O2 clean..




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